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MX12R Semiconductor Inspection Microscope for Grain Analysis
MX12R is an upright metallurgical microscope from Nanjing AMADA Instrument designed for semiconductor and FPD grain analysis, featuring an infinity color-corrected optical system, tilting trinocular head, and interchangeable BD semi-APO DIC and long working distance objectives. It supports bright field, dark field, polarizing, and DIC observation modes with precise mechanical stage control and built-in 100–240V wide voltage operation.
- Infinity color-corrected optical system ensures consistent image quality across magnifications
- Tilting trinocular head with 0–35 degree adjustment and 50–76 mm interpupillary range for ergonomic viewing
- Long working distance BD semi-APO objectives (20X, 50X, 100X) for inspecting thick or elevated samples
- Electronic sextuple nosepiece with DIC slot enables rapid switching between polarizing and DIC modes
- Three-layer mechanical stage with 356 mm X 305 mm travel and 3+L/50 μm repeated positioning accuracy for precise sample alignment
- Built-in 100–240V wide voltage system supports global power supply compatibility
Technical features
- Infinity color-corrected optical system for high-resolution imaging
- Tilting trinocular head with 0–35 degree adjustment, interpupillary distance 50–76 mm, splitting ratio 100:0 or 0:100
- High eye point wide field plan eyepiece PL10X/25mm with adjustable diopter and reticle attachment
- BD semi-APO DIC objectives: 5X, 10X, 20X, 50X, 100X
- Long working distance BD semi-APO DIC objective: 20X
- Long working distance BD semi-APO objectives: 50X, 100X
- Electronic BD sextuple nosepiece with DIC slot for rapid mode switching
- Reflected frame with low position coaxial focus mechanism: coarse range 35 mm, fine precision 0.001 mm
Who it is for
- Semiconductor manufacturers and process engineers
- FPD and display panel quality control teams
- Materials science researchers analyzing grain boundaries and crystal structures
- Industrial labs requiring high-precision metallurgical inspection with DIC and polarizing options
- Procurement engineers sourcing upright metallurgical microscopes for inspection lines
Specifications
| Model | MX12R |
|---|---|
| Optical System | Infinity color corrected |
| Viewing Head | Tilting trinocular, 0–35° adjustable, 50–76 mm interpupillary |
| Eyepiece | PL10X/25mm high eye point wide field plan, adjustable diopter |
| Objective Types | BD semi-APO DIC: 5X, 10X, 20X, 50X, 100X; Long working distance: 20X, 50X, 100X |
| Nosepiece | Electronic BD sextuple with DIC slot |
| Focus Mechanism | Low position coaxial, coarse 35 mm, fine 0.001 mm |
| Stage Type | Three-layer mechanical and electronic stage |
| Mechanical Stage Size | 718 mm X 420 mm |
| Mechanical Stage Travel | 356 mm X 305 mm |
| Electronic Stage Size | 495 mm X 641 mm |
| Electronic Stage Travel | 306 mm X 306 mm |
| Positioning Accuracy | 3+L/50 μm |
| Illumination | BD reflected, electronic variable aperture, field diaphragm, bright/dark field switch |
| Power Supply | 100–240V built-in |
| C-mount Adapter | 0.5X, 0.65X, 1X |
| Included Accessories | Polarizing kit, interference filters, high precision micrometer, DIC attachment |
Use guide
- Select reflected frame for surface inspection of wafers and FPDs
- Use long working distance objectives (20X, 50X, 100X) when inspecting elevated or thick samples
- Enable DIC mode via the nosepiece slot for enhanced contrast in grain boundary analysis
- Use electronic stage for automated scanning with high positioning accuracy
- Attach C-mount adapter to connect to digital camera or recording system
FAQ
What is the working distance for the 50X and 100X objectives?
Long working distance BD semi-APO objectives (50X, 100X) are designed for elevated or thick samples; exact values depend on objective design and are specified in the technical table.
Can I use this microscope for bright field and dark field inspection?
Yes. The BD reflected illuminator includes a switch to toggle between bright field and dark field modes.
Is the stage suitable for automated scanning?
Yes. The 495 mm X 641 mm electronic stage provides 306 mm X 306 mm travel with 3+L/50 μm repeated positioning accuracy for automated inspection.
What camera adapters are available?
C-mount adapters are available in 0.5X, 0.65X, and 1X magnification options for digital camera integration.
Does the microscope support polarizing and DIC observation?
Yes. The system includes slots for polarizing kit and DIC attachment, with a dedicated DIC slot in the electronic nosepiece.
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