Description
| specifications | parameter |
| Single screw hole multiple bidirectional positioning accuracy | ＜0.003mm |
| Multi-hole locating axis coincidence accuracy | ＜0.01mm |
| Height difference of converted end faces of each screw hole | ＜0.005mm |
| Lens installation thread selection | M32/M26/M25/RMS |
| Number of objective lenses | 6/5/4 holes |
